 | Advanced MOVPE Technology for III-V Compound Semiconductor Thin Film Growth
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| | Yukihiro Shimogaki1)2), Ho-Jin Oh1)2) and Yasuyuki Fukushima1)2) |
| 1) University of Tokyo
2) CREST, JST |
| | The precise control of the stoichiometry, thickness, and interface structure of III-V compound semiconductor thin films is an essential aspect in developing high performance OEIC devices. |
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